Title | High-quality-factor tantalum oxide nanomechanical resonators by laser oxidation of TaSe2 |
Publication Type | Journal Article |
Year of Publication | 2015 |
Authors | Cartamil-Bueno SJ., Steeneken PG., Tichelaar FD., Navarro-Moratalla E, Venstra WJ, van Leeuwen R, Coronado E, van der Zant HSJ, Steele GA, Castellanos-Gomez A |
Journal | Nano Research |
Volume | 8 |
Pagination | 2842-2849 |
ISSN | 1998-0124 |
Keywords | high quality factor, laser oxidation, mechanical resonators, optical interferometer, tantalum oxide, TaSe2 |
URL | http://dx.doi.org/10.1007/s12274-015-0789-8 |
DOI | 10.1007/s12274-015-0789-8 |