High-quality-factor tantalum oxide nanomechanical resonators by laser oxidation of TaSe2

TitleHigh-quality-factor tantalum oxide nanomechanical resonators by laser oxidation of TaSe2
Publication TypeJournal Article
Year of Publication2015
AuthorsCartamil-Bueno SJ., Steeneken PG., Tichelaar FD., Navarro-Moratalla E, Venstra WJ, van Leeuwen R, Coronado E, van der Zant HSJ, Steele GA, Castellanos-Gomez A
JournalNano Research
Volume8
Pagination2842-2849
ISSN1998-0124
Keywordshigh quality factor, laser oxidation, mechanical resonators, optical interferometer, tantalum oxide, TaSe2
URLhttp://dx.doi.org/10.1007/s12274-015-0789-8
DOI10.1007/s12274-015-0789-8
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